Engineering Research Seminar Series 26, 2011: Outlier Distribution Detection Approach to Semiconductor Eafer Fabrication Process Monitoring

Dr Melanie Ooi, lecturer from School of Engineering, Monash University Sunway Campus

Date: 2011-08-10
Time: 11:00 to 12:00
Venue: Classroom 9-3-03


It is well known that most of the defect clusters found on the fabricated semiconductor wafers have an assignable cause, which if rectified quickly can improve product quality and lower the production cost. This paper proposes a statistical correlation method that extends an existing Automatic Defect Cluster Analysis System (ADCAS). The method can be implemented in real-time such that the manufacturing cost would not be negatively affected. The proposed system generates a list of equipment having a high likelihood of causing the systematic failure. This technique is fast and easy to implement, and it provides early detection and prevention of failures associated with problematic equipment/process during manufacturing.


About the Speaker

Melanie Po-Leen Ooi is a lecturer at Monash University, Sunway campus. She obtained First Class Honors for her BEng (Hons) degree from Monash University in 2003, and went on to complete her MEngSc (Research) and PhD degrees in the same university in 2006 and 2011 respectively. Through extensive collaboration with Freescale Semiconductor and Texas Instruments, she has developed new testing methodologies for integrated. Her areas of research include embedded hardware design, testing and design of microelectronic devices, image and signal processing, test measurement and instrumentation circuits where she has authored over 30 publications.