Engineering Research Seminar Series 34, 2011: Fabrication of High Aspect Ratio SU-8 Microstructures on Piezoelectric Transducers

Dr Narayanan Ramakrishnan, lecturer from School of Engineering, Monash University Sunway Campus

Date: 2011-09-28
Time: 11:00 to 12:00
Venue: Classroom 9-3-04


In this talk a methodology to fabricate high aspect ratio (HAR) SU-8 micro structures on piezoelectric and metallic substrates will be presented. We have carried out several fabrication trials to optimize the SU-8 fabrication process. The fabrication recipe mentioned in the SU-8 (Microchem, USA) datasheet is employed for the initial fabrication trials. The SU-8 structures (micropillars) fabricated during these trials resulted in poor bonding with the piezoelectric substrate. In the later trials a thin film of OmniCoat (Microchem, USA) is coated over the substrate before coating the SU-8 film to improve the adhesion quality of the SU-8 micropillars to the substrate. The fabrication methodology used during the trails and results on the quality of the fabricated HAR SU-8 pillars will be discussed.

About the Speaker

Dr. N. Ramakrishnan obtained First Class Bachelors Degree in Electronics and Communication Engineering from the University of Madras. Subsequently, he pursued his Masters in Technology - Sensor System Technology at Vellore Institute of Technology and excelled with first class distinction.  Prior to joining MUSC Dr. N. Ramakrishnan was a Researcher at Sensor Group, University of Rome, Tor Vergata, Italy.  He has completed his PhD in Nanotechnology from the Centre for Nanotechnology, Indian Institute of Technology Guwahati, India. Dr. N. Ramakrishnan’s research area includes MEMS Devices, Piezoelectric devices, Energy harvesting systems and Micro fabrication technologies.